Innovative FA hardware solution to enable system-level debug of 3D ICs

Abstract

The rapid growth of generative Artificial Intelligence (AI), automotive electrification and Internet of Things (IoT) is driving an unprecedented demand for high-performance Integrated Circuits (ICs), projected to push the semiconductor industry to a $1 trillion business by 2030 (Burkacky et al., 2022; PWC, 2025). This drove the adoption of advanced process (FinFET, Gate-All-Around, Forksheet, CFET, Backside Power Delivery Network) and 3D package technologies (chiplets, Heterogeneous Integration, Co-packaged Optics). Unfortunately, component stacking in 3D ICs such as Package-on-Package (PoP) products creates an optical barrier during Electrical Fault Isolation (EFI). This paper presents a novel Failure Analysis (FA) hardware and sample preparation solution that enables System-Level FA on mobile System-on-a-Chip (SoC) PoP devices, where the DRAM is stacked atop the logic controller device. The primary challenge in performing EFI on the bottom die is providing direct line-of-sight (LoS) access while preserving the top DRAM functionality through extremely small interconnects called Through Interposer Vias (TIVs). For the first time, this groundbreaking hardware solution overcomes the challenge of connecting a DRAM atop the SoC silicon, utilizing the smallest possible interposer pin pitch (∼210 um) and advanced DRAM card design that incorporates stringent design rules to enable up to 6.3 Gbps using a DDR training test and runs standard Android stress applications. The results of the FA hardware solution for SLT platform will be discussed, together with several FA use cases that were enabled through this innovative solution. Lastly, this paper will discuss the limitations of this hardware, together with opportunities for improvement and further work. This novel solution paves the way for the failure analysis of 3D IC devices on a system level platform, which are utilized not only in mobile applications, but also for cloud, server, and quantum computing ICs assembled in complex packages.