Al mediated solid phase epitaxy of silicon on insulator
Conference Paper
(2010)
Author(s)
A. Sakic (TU Delft - Electronic Components, Technology and Materials)
Y Civale (TU Delft - Old - EWI Sect. ECTM)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
C Biasotto (TU Delft - Electronic Components, Technology and Materials)
V Jovanovic (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1557/PROC-1245-A20-03
To reference this document use:
https://resolver.tudelft.nl/uuid:80fdf861-8b74-4df6-8deb-7fcc3433fa52
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
427-432
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