Location-control of large Si grains by dual-beam excimer-laser and thick oxide portion

Journal Article (2000)
Author(s)

Ryoichi Ishihara (TU Delft - Electronic Components, Technology and Materials)

A Burtsev (External organisation)

Paul F.A. Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Issue number
7
Volume number
39
Pages (from-to)
3872-3878

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