Location-control of large Si grains by dual-beam excimer-laser and thick oxide portion

Journal article (2000)

Authors

R. Ishihara Electronic Components, Technology and Materials - EEMCS
A Burtsev External organisation
P.F.A. Alkemade Old - sect Electronic Materials (NS/EM)
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2000

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials