The need for multi-scale approaches in Cu/low-k reliability issues
Journal Article
(2008)
Author(s)
CA Yuan (TU Delft - Computational Design and Mechanics)
O van der Sluis (TU Delft - Computational Design and Mechanics)
Willem D. van Driel (TU Delft - Dynamics of Micro and Nano Systems)
Guo-Qi Zhang (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Computational Design and Mechanics
DOI related publication
https://doi.org/doi:10.1016/j.microrel.2008.03.024
To reference this document use:
https://resolver.tudelft.nl/uuid:83b355bb-732c-4d90-afc4-864384e0c37b
More Info
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Publication Year
2008
Research Group
Computational Design and Mechanics
Volume number
48
Pages (from-to)
833-842
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