A novel micromachining process using pattern transfer over large topography for RF silicon technology
Conference Paper
(2000)
Author(s)
PN Pham (TU Delft - Electronic Components, Technology and Materials)
Pasqualina M. Sarro (TU Delft - Electronic Components, Technology and Materials)
TK Ng (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
R Behzad (External organisation)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:86e87647-3e69-4ebf-a4d8-3d0aa374a78c
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Publication Year
2000
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
125-128
ISBN (print)
90-73461-24-3
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