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R Behzad
Academic Work (1)
Conference paper (1)
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A novel micromachining process using pattern transfer over large topography for RF silicon technology
Conference paper (2000) -
PN Pham (author)
,
Pasqualina M Sarro (author)
,
Pasqualina M. Sarro (author)
,
Lina Sarro (author)
,
Pasqualina Sarro (author)
,
TK Ng (author)
,
R Behzad (author)
,
JN Burghartz (author)