Actuator for contactless transport and positioning of large flat substrates

Conference paper (2008)

Authors

J. Wesselingh Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.A.J. van Ostayen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

More Info

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http://resolver.tudelft.nl/uuid:87bf4fb1-b26d-4c20-996a-e570b6effd6b

Published Date

2008

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design