Actuator for contactless transport and positioning of large flat substrates
Conference Paper
(2008)
Author(s)
Jasper Wesselingh (TU Delft - Mechatronic Systems Design)
R.A.J. van Ostayen (TU Delft - Mechatronic Systems Design)
Jo W. Spronck (TU Delft - Mechatronic Systems Design)
RH Munnig Schmidt (TU Delft - Mechatronic Systems Design)
J. van Eijk (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
To reference this document use:
https://resolver.tudelft.nl/uuid:87bf4fb1-b26d-4c20-996a-e570b6effd6b
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Publication Year
2008
Research Group
Mechatronic Systems Design
Pages (from-to)
145-149
ISBN (print)
978-0-9553082-5-3
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