Amorphous silicon-carbide photonics for ultrasound imaging
R. Tufan Erdogan (TU Delft - Dynamics of Micro and Nano Systems)
Bruno Lopez-Rodriguez (TU Delft - ImPhys/Esmaeil Zadeh group)
Wouter J. Westerveld (TU Delft - Dynamics of Micro and Nano Systems)
Sophinese Iskander-Rizk (TU Delft - Optical Technologies)
Gerard J. Verbiest (TU Delft - Dynamics of Micro and Nano Systems)
Iman Esmaeil Zadeh (TU Delft - ImPhys/Esmaeil Zadeh group)
Peter G. Steeneken (TU Delft - Precision and Microsystems Engineering)
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Abstract
Photonic ultrasound sensors promise unparalleled spatial and temporal resolution in ultrasound imaging due to their size-independent noise figure, high sensitivity, and broad bandwidth. Optical materials can further improve performance and stability, but achieving small size, high sensitivity, and wide bandwidth remains challenging. This work introduces amorphous silicon carbide (a-SiC) for ultrasound sensing, offering strong optical confinement, low propagation loss, and high stability for miniaturized microring sensors. We demonstrate a compact detection system with a 20-transducers linear array coupled to a single bus waveguide. The sensors achieve an optical finesse of 1320 and intrinsic sensitivity of 78 fm kPa−1, leading to a noise-equivalent pressure below 55mPa/Hz, calibrated from 3.36 MHz to 30 MHz. High-resolution imaging of fine structures validates real-world applicability. a-SiC is also easily integrated on most substrates due to its low deposition temperature. Our results position a-SiC as a promising solution for optical ultrasound sensing, combining miniaturization, low-loss, and high-sensitivity.
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