Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma

Journal article (2007)

Authors

C Biasotto Microelectronics
AM Daltrini External organisation
RC Teixeira External organisation
FA Boscoli External organisation
JA Diniz External organisation
SA Moshkalev External organisation
I Doi External organisation
Department
Microelectronics
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Published Date

2007

Language

Undefined/Unknown

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Department

Microelectronics