SA Moshkalev | TU Delft Repository

SM

SA Moshkalev

Journal article (2)

2 records found

1

Silicon nitride thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition for micromechanical system applications

Journal article (2008) - C Biasotto (author), JA Diniz (author), AM Daltrini (author), SA Moshkalev (author), MJR Monteiro (author)

Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma

Journal article (2007) - C Biasotto (author), AM Daltrini (author), RC Teixeira (author), FA Boscoli (author), JA Diniz (author), SA Moshkalev (author), I Doi (author)