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MJR Monteiro
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2 records found
Silicon nitride thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition for micromechanical system applications
Journal article -
C Biasotto
,
JA Diniz
,
AM Daltrini
,
SA Moshkalev
,
MJR Monteiro
Investigation and characterization of silicon nitride thin films deposited by ECR-CVD plasma for Microelectromechanical systems application
Journal article -
C Biasotto
,
JA Diniz
,
AM Daltrini
,
SA Moshkalyov
,
MJR Monteiro