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MM
MJR Monteiro
Academic Work (2)
Journal article (2)
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2 records found
1
Silicon nitride thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition for micromechanical system applications
Journal article (2008) -
C Biasotto (author)
,
JA Diniz (author)
,
AM Daltrini (author)
,
SA Moshkalev (author)
,
MJR Monteiro (author)
Investigation and characterization of silicon nitride thin films deposited by ECR-CVD plasma for Microelectromechanical systems application
Journal article (2007) -
C Biasotto (author)
,
JA Diniz (author)
,
AM Daltrini (author)
,
SA Moshkalyov (author)
,
MJR Monteiro (author)
