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SM
SA Moshkalyov
1 records found
1
Authored
Investigation and characterization of silicon nitride thin films deposited by ECR-CVD plasma for Microelectromechanical systems application
Journal article (2007) -
C Biasotto
,
JA Diniz
,
AM Daltrini
,
SA Moshkalyov
,
MJR Monteiro
