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FA Boscoli
Academic Work (1)
Journal article (1)
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Deposition of sacrificial silicon oxide layers by electron cyclotron resonance plasma
Journal article (2007) -
C Biasotto (author)
,
AM Daltrini (author)
,
RC Teixeira (author)
,
FA Boscoli (author)
,
JA Diniz (author)
,
SA Moshkalev (author)
,
I Doi (author)
