Shape fitting
Application to the estimation of wafer chuck deformation
Johan Vogel (TU Delft - Mechatronic Systems Design)
Robert Munnig Schmidt – Promotor (TU Delft - Mechatronic Systems Design)
Jo Spronck – Copromotor (TU Delft - Mechatronic Systems Design)
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Abstract
In wafer scanners - the machines that define the details of electronic chips - there is a need for highly accurate deformation measurements of the machine components during the chip manufacturing process.
This thesis develops an estimation methodology, based on shape fitting principles, that aims at a low estimation error and addresses the specific requirements related to one of the components of a wafer scanner, the wafer chuck.