Shape fitting

Application to the estimation of wafer chuck deformation

Doctoral thesis (2016)

Authors

J.G. Vogel Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2016 J.G. Vogel
DOI
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https://doi.org/10.4233/uuid:8f23c2ff-1589-4a8c-8868-03c2f42b4d73
Position sensing Shape estimation Shape fitting Wafer chuck deformation Least squares optimisation
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Published Date

2016

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

In wafer scanners - the machines that define the details of electronic chips - there is a need for highly accurate deformation measurements of the machine components during the chip manufacturing process.
This thesis develops an estimation methodology, based on shape fitting principles, that aims at a low estimation error and addresses the specific requirements related to one of the components of a wafer scanner, the wafer chuck.