Fabrication of nanochannels using glass to glass anodic bonding
Conference Paper
(2003)
Author(s)
VG Kutchoukov (TU Delft - Electronic Instrumentation)
FPJ Laugere (TU Delft - Electronic Instrumentation)
W van der Vlist (TU Delft - Electronic Components, Technology and Materials)
L Pakula (TU Delft - Electronic Instrumentation)
Yuval Garini (TU Delft - ImPhys/Quantitative Imaging)
P.F.A. Alkemade (TU Delft - Old - sect Electronic Materials (NS/EM))
Andre Bossche (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:9963825a-a2f1-4126-b4e9-e15b030c0e20
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Publication Year
2003
Research Group
Electronic Instrumentation
Pages (from-to)
1327-1330
ISBN (print)
0-7803-7731-1
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