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A Charge Detection ROIC with Sub-6ppm Error Rate and 200μW Power Consumption in Scanning Electron Microscopy

Conference Paper (2025)
Author(s)

A. M. Zaki (TU Delft - Electronic Instrumentation)

L. Bouman (Student TU Delft)

S. Nihtianov (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/ESSERC66193.2025.11214094 Final published version
More Info
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Publication Year
2025
Language
English
Research Group
Electronic Instrumentation
Bibliographical Note
Green Open Access added to TU Delft Institutional Repository as part of the Taverne amendment. More information about this copyright law amendment can be found at https://www.openaccess.nl. Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Pages (from-to)
569-572
Publisher
IEEE
ISBN (print)
979-8-3315-2540-8
ISBN (electronic)
979-8-3315-2539-2
Event
2025 IEEE European Solid-State Electronics Research Conference (ESSERC) (2025-09-08 - 2025-09-11), Munich, Germany
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47
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Abstract

Imaging nanoscopic features with Scanning Electron Microscopes (SEMs) requires rapid specimen scanning with a low-energy electron beam. The electron detector is highly pixelated. Each pixel is interfaced with a high-precision, widebandwidth, low-noise readout integrated circuit (ROIC), to enable single-electron counting operation. This paper introduces an innovative power-efficient pixel readout frontend architecture, achieving a time resolution of 2.5 ns. The fabricated prototype in 40 nm CMOS process demonstrates better than 6 ppm electron detection precision. It consumes only 200 μ W, with an area of 150 μ m × 100 μ m.

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