Sub-10-nm nanolithography with a scanning helium beam
Journal Article
(2009)
Author(s)
VA Sidorkin (TU Delft - QN/Kavli Nanolab Delft)
E van Veldhoven (External organisation)
EWJM van der Drift (TU Delft - QN/Kavli Nanolab Delft)
P. F.A. Alkemade (TU Delft - QN/Kavli Nanolab Delft, TU Delft - QN/Fysics of NanoElectronics)
Huub Salemink (TU Delft - QN/Photronic Devices)
D Maas (External organisation)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:9c6db54a-4d86-48e5-9706-8742ca508a70
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Publication Year
2009
Research Group
QN/Kavli Nanolab Delft
Issue number
4
Volume number
B27
Pages (from-to)
L18-L20
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