Library
local_library Home Repository

Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology

Journal Article (2022)
Author(s)

J. Romijn (TU Delft - Microelectronics)

Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)

L.M. Middelburg (TU Delft - Electronic Components, Technology and Materials)

B. el Mansouri (TU Delft - Electronic Components, Technology and Materials)

H. van Zeijl (TU Delft - Electronic Components, Technology and Materials)

Alexander May (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)

Tobias Erlbacher (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)

Johan Leijtens (Lens R&D BV)

G. Zhang (TU Delft - Electronic Components, Technology and Materials)

Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)

Department
Microelectronics
Copyright
© 2022 J. Romijn, S. Vollebregt, L.M. Middelburg, B. el Mansouri, H.W. van Zeijl, Alexander May, Tobias Erlbacher, Johan Leijtens, Kouchi Zhang, Pasqualina M Sarro
DOI related publication
https://doi.org/10.1038/s41378-022-00446-3
More Info
expand_more
Publication Year
2022
Language
English
Copyright
© 2022 J. Romijn, S. Vollebregt, L.M. Middelburg, B. el Mansouri, H.W. van Zeijl, Alexander May, Tobias Erlbacher, Johan Leijtens, Kouchi Zhang, Pasqualina M Sarro
Related content
Department
Microelectronics
Issue number
1
Volume number
8
Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Abstract

This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are significant improvements over previous reports. UV optoelectronics have applications in flame detection, satellites, astronomy, UV photography, and healthcare. The complexity of this optoelectronic system paves the way for new applications such harsh environment microcontrollers.