Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology

Conference Paper (2022)
Author(s)

J. Romijn (TU Delft - Electronic Components, Technology and Materials)

S. Vollebregt (TU Delft - Electronic Components, Technology and Materials)

Alexander May (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)

Tobias Erlbacher (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)

H. van Zeijl (TU Delft - Electronic Components, Technology and Materials)

Johan Leijtens (Lens R&D BV)

G. Zhang (TU Delft - Electronic Components, Technology and Materials)

P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
Copyright
© 2022 J. Romijn, S. Vollebregt, Alexander May, Tobias Erlbacher, H.W. van Zeijl, J.A.P. Leijtens, Kouchi Zhang, Pasqualina M Sarro
DOI related publication
https://doi.org/10.1109/MEMS51670.2022.9699533
More Info
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Publication Year
2022
Language
English
Copyright
© 2022 J. Romijn, S. Vollebregt, Alexander May, Tobias Erlbacher, H.W. van Zeijl, J.A.P. Leijtens, Kouchi Zhang, Pasqualina M Sarro
Related content
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
535-538
ISBN (print)
978-1-6654-0912-4
ISBN (electronic)
978-1-6654-0911-7
Reuse Rights

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Abstract

In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of the photodetectors and CMOS readout circuitry on-chip is vital to compete with the performance of silicon state-of-the-art and for the concept to be adopted by industry, which is where previous implementations of visible blind sun sensors are lacking.

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