Visible Blind Quadrant Sun Position Sensor in a Silicon Carbide Technology

Conference Paper (2022)
Author(s)

Joost Romijn (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Sten Vollebregt (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Alexander May (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)

Tobias Erlbacher (Fraunhofer Institute for Integrated Systems and Devices Technology IISB)

Henk W. van Zeijl (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Johan Leijtens (Lens R&D BV)

Guoqi Zhang (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Pasqualina M. Sarro (TU Delft - Electrical Engineering, Mathematics and Computer Science)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/MEMS51670.2022.9699533 Final published version
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Publication Year
2022
Language
English
Related content
Research Group
Electronic Components, Technology and Materials
Article number
9699533
Pages (from-to)
535-538
ISBN (print)
978-1-6654-0912-4
ISBN (electronic)
978-1-6654-0911-7
Event
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (2022-01-09 - 2022-01-13), Hybrid at Tokyo, Japan
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Abstract

In this paper, we present a quadrant sun position sensor microsystem device in a silicon carbide technology that operates in a field-of-view of ±33° and reaches a mean error of 1.9° in this range. This will allow, for the first time, an inherently visible blind sun position sensor in a CMOS compatible technology. Opto-electronic integration of the photodetectors and CMOS readout circuitry on-chip is vital to compete with the performance of silicon state-of-the-art and for the concept to be adopted by industry, which is where previous implementations of visible blind sun sensors are lacking.

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