Efficient Damage Sensitivity Analysis of Advanced Cu Low-k Bond Pad Structures Using Area Release Energy
Conference Paper
(2006)
Author(s)
O van der Sluis (External organisation)
RAB Engelen (External organisation)
W. D. van Driel (TU Delft - Dynamics of Micro and Nano Systems)
MAJ van Gils (External organisation)
RBR van Silfhout (External organisation)
Research Group
Dynamics of Micro and Nano Systems
To reference this document use:
https://resolver.tudelft.nl/uuid:b1baeb04-e009-4dbb-a89c-c4eb6924399b
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Publication Year
2006
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
1-8
ISBN (print)
1-4244-0276X
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