Simulation for stability of a beam-mass based high-resolution MEMS gravimeter
Guigen Ye (China University of Petroleum (East China))
Xuejun Fan (Lamar University, TU Delft - Electronic Components, Technology and Materials)
L.M. Middelburg (TU Delft - Electronic Components, Technology and Materials)
Brahim el el Mansouri (TU Delft - Electronic Components, Technology and Materials)
Rene H. Poelma (TU Delft - Electronic Components, Technology and Materials)
Guo Zhang (TU Delft - Electronic Components, Technology and Materials)
More Info
expand_more
Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.
Abstract
In this paper, stability and mechanistic simulations for a four-beam-mass-based MEMS gravimeter were conducted, and guidelines for the gravimeter design were proposed. Based on a prototyped MEMS device, the nonlinear finite element model was validated first against the experimental results. Then, we demonstrated three different scenarios in design that have three distinct modes of deformation: the mode with buckling (case 1), the mode without buckling but with a single zero-stiffness point (case 2), and the mode without both buckling and zero-stiffness point (case 3). Both case 1 and case 2 presented an unstable and sensitive region, in which a tiny perturbation could result in a rapid increase of the resonance frequency. Case 3, on the other hand, could provide a stable and low resonance frequency with a linear relationship between the displacement and gravitational acceleration. An optimized design of a beam/spring-mass-based relative gravimeter could be achieved using the above guidelines.
help_outline