Graphene gas pumps

Conference Paper (2018)
Author(s)

Dejan Davidovikj (TU Delft - QN/Steeneken Lab, TU Delft - QN/van der Zant Lab)

Damian Bouwmeester (Student TU Delft)

Herre S.J. van der Zant (TU Delft - QN/van der Zant Lab)

P. G. Steeneken (TU Delft - Dynamics of Micro and Nano Systems, TU Delft - QN/Steeneken Lab)

Research Group
QN/Steeneken Lab
Copyright
© 2018 D. Davidovikj, Damian Bouwmeester, H.S.J. van der Zant, P.G. Steeneken
DOI related publication
https://doi.org/10.1109/MEMSYS.2018.8346632
More Info
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Publication Year
2018
Language
English
Copyright
© 2018 D. Davidovikj, Damian Bouwmeester, H.S.J. van der Zant, P.G. Steeneken
Research Group
QN/Steeneken Lab
Pages (from-to)
628-631
ISBN (electronic)
9781538647820
Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Abstract

We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.

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