We report on a pneumatically coupled graphene pump system, comprising two cylindrical cavities of 3 femtoliter connected by a narrow trench, all covered by a thin few-layer graphene membrane. Local electrodes at the bottom of each cavity enable electrostatic pressure control and manipulation of gas flow through the channel. Using laser interferometry, we measure graphene displacement as a function of driving amplitude and frequency, thus providing proof-of-principle for using graphene membranes to pump attoliter quantities of gases and demonstrating pneumatic actuation at the nanoscale.

We report on the development of a pneumatically coupled graphene membrane system, comprising of two circular cavities connected by a narrow trench. Both cavities and the trench are covered by a thin few-layer graphene membrane to form a sealed dumbbell-shaped chamber. Local electrodes at the bottom of each cavity allow for actuation of each membrane separately, enabling electrical control and manipulation of the gas flow inside the channel. Using laser interferometry, we measure the displacement of each drum at atmospheric pressure as a function of the frequency of the electrostatic driving force and provide a proof-of-principle of using graphene membranes to pump attolitre quantities of gases at the nanoscale.