Integration of Laser-Annealed Junctions in a Low-Temperature High-k Metal-Gate MISFET
Conference Paper
(2009)
Author(s)
C Biasotto (TU Delft - Electronic Components, Technology and Materials)
V Jovanovic (TU Delft - Electronic Components, Technology and Materials)
V Gonda (TU Delft - Electronic Components, Technology and Materials)
J van der Cingel (TU Delft - Electronic Components, Technology and Materials)
S. Milosavljevic (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:b2d61dbd-bb94-4eed-b7da-122f78f1be65
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
181-184
ISBN (print)
978-1-4244-3705-4
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