A new self-sealing thin-film encapsulation process for MEMS
Conference Paper
(2013)
Authors
F. Santagata (TU Delft - Electronic Components, Technology and Materials)
I Zaccaria (External organisation)
R.H. Poelma (TU Delft - Electronic Components, Technology and Materials)
J.F. Creemer (TU Delft - Electronic Components, Technology and Materials)
G. Zhang (TU Delft - Electronic Components, Technology and Materials)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://doi.org/10.1109/Transducers.2013.6626893
TU Delft Repository resolver:
https://resolver.tudelft.nl/b469dea4-7174-4b3e-98e3-a626e1ba6d27
More Info
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Publication Year
2013
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
822-825
ISBN (print)
978-1-4673-5983-2
DOI:
https://doi.org/10.1109/Transducers.2013.6626893
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