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Conference paper (1)
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A new self-sealing thin-film encapsulation process for MEMS
Conference paper (2013) -
F. Santagata (author)
,
I Zaccaria (author)
,
René H. Poelma (author)
,
Fredrik Creemer (author)
,
Kouchi Zhang (author)
,
Pasqualina M Sarro (author)
