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Academic Work (1)
Conference paper (1)
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A new self-sealing thin-film encapsulation process for MEMS
Conference paper (2013) -
F. Santagata (author)
,
I Zaccaria (author)
,
R.H. Poelma (author)
,
J.F. Creemer (author)
,
G. Zhang (author)
,
P.M. Sarro (author)
