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Optimization and integration of room temperature RF sputtered ICO as TCO layers in high-performance SHJ solar cells

Journal Article (2025)
Author(s)

E. Özkol (TU Delft - Photovoltaic Materials and Devices)

Maria M.R. Magalhães (NOVA School of Science and Technology and CEMOP/UNINOVA)

Yifeng Zhao (TU Delft - Photovoltaic Materials and Devices)

L. Cao (TU Delft - Photovoltaic Materials and Devices)

P Perez Rodriguez (TU Delft - Photovoltaic Materials and Devices)

K. Kovačević (TU Delft - Photovoltaic Materials and Devices)

Paul Procel Moya (TU Delft - Photovoltaic Materials and Devices)

Manuel João Mendes (NOVA School of Science and Technology and CEMOP/UNINOVA)

M. Zeman (TU Delft - Photovoltaic Materials and Devices)

O Isabella (TU Delft - Photovoltaic Materials and Devices)

Research Group
Photovoltaic Materials and Devices
DOI related publication
https://doi.org/10.1016/j.solmat.2025.113637
More Info
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Publication Year
2025
Language
English
Research Group
Photovoltaic Materials and Devices
Volume number
288
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Abstract

In this work, we optimize cerium-doped indium oxide – ICO – thin films with respect to sputtering parameters such as oxygen flow, deposition pressure, applied RF power. Optimized 35-nm-thick ICO layer demonstrated a mobility of 44.22 cm2/Vs, a carrier concentration of 1.65 × 1020/cm3, and a resistivity of 8.56 × 10−4 Ω cm. Application of such layers into front/back contact silicon heterojunction (FBC-SHJ) solar cells enhanced the short-circuit current density (JSC) by 0.67 when compared to SHJ cell endowed with tin-doped indium oxide (ITO), respectively. This enhancement yielded an absolute power conversion efficiency (PCE) improvement of 0.55 %, reaching efficiencies of around 23.6 % for devices with ICO layers.