Laser Annealing of Self-Aligned As+ Implants in Contact Windows for Ultrashallow Junction Formation

Biasotto, C; Gonda, V; Nanver, L.K.; van der Cingel, J.; Jovanovic, V.

Laser Annealing of Self-Aligned As+ Implants in Contact Windows for Ultrashallow Junction Formation

Conference paper (2009)

Authors

C Biasotto Electronic Components, Technology and Materials -

V Gonda Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

J. van der Cingel Electronic Components, Technology and Materials -

V. Jovanovic Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials