Laser Annealing of Self-Aligned As+ Implants in Contact Windows for Ultrashallow Junction Formation

Conference Paper (2009)
Author(s)

C Biasotto (TU Delft - Electronic Components, Technology and Materials)

V Gonda (TU Delft - Electronic Components, Technology and Materials)

LK Nanver (TU Delft - Electronic Components, Technology and Materials)

J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)

V Jovanovic (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
19-27
ISBN (print)
978-1-5677-737-7

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