Laser Annealing of Self-Aligned As+ Implants in Contact Windows for Ultrashallow Junction Formation
Conference Paper
(2009)
Author(s)
C Biasotto (TU Delft - Electronic Components, Technology and Materials)
V Gonda (TU Delft - Electronic Components, Technology and Materials)
LK Nanver (TU Delft - Electronic Components, Technology and Materials)
J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)
V Jovanovic (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:bed94118-2ccc-49bf-a247-5704c9825782
More Info
expand_more
expand_more
Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
19-27
ISBN (print)
978-1-5677-737-7
No files available
Metadata only record. There are no files for this record.