Process technology of high-aspect-ratio silicon beams for stretchable silicon electronics

T. Zoumpoulidis (TU Delft - Old - EWI Sect. ECTM)

J. Tian (TU Delft - Old - EWI Sect. ECTM)

S Sosin (TU Delft - Old - EWI Sect. ECTM)

M. Bartek (TU Delft - Old - EWI Sect. ECTM)

L Wang (TU Delft - Electronic Components, Technology and Materials)

K.M.B. Jansen (TU Delft - Computational Design and Mechanics)

L.J. Ernst (TU Delft - Computational Design and Mechanics)

R. Dekker (TU Delft - Electronic Components, Technology and Materials)

P. de Graaf (External organisation)