Single-crystalline and bamboo Al lines fabricated by graphoepitaxy

Conference paper (1996)

Authors

MJC van de Homberg QN/Fysics of NanoElectronics

A.H. Verbruggen QN/Fysics of NanoElectronics

P.F.A. Alkemade Old - sect Electronic Materials (NS/EM)

S Radelaar OLD Metals Processing, Microstructures and Properties

Research Group

QN/Fysics of NanoElectronics

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Published Date

1996

Language

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Research Group

QN/Fysics of NanoElectronics