Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer

Wu, H.W.; Emadi, A; van der Vlist, W.; Grabarnik, S; de Graaf, Ger; Wolffenbuttel, R.F.

Design and fabrication of a thermopile detector array with scaled elements for an integrated IR microspectrometer

Conference paper (2008)

Authors

H.W. Wu Electronic Instrumentation

A Emadi Electronic Instrumentation

W. van der Vlist Electronic Components, Technology and Materials

S Grabarnik Electronic Instrumentation

Ger de Graaf Electronic Instrumentation

R.F. Wolffenbuttel Electronic Instrumentation

Research Group

Electronic Instrumentation

Conference contrib. non-refer.

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Published Date

2008

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Research Group

Electronic Instrumentation

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