Application of Laser Annealing in the EU FP6 Project D-DotFET

Nanver, L.K.; Jovanovic, V.; Biasotto, C; van der Cingel, J.

Application of Laser Annealing in the EU FP6 Project D-DotFET

Conference paper (2009)

Authors

L.K. Nanver Electronic Components, Technology and Materials -

V. Jovanovic Electronic Components, Technology and Materials -

C Biasotto Electronic Components, Technology and Materials -

J. van der Cingel Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:c7262455-2b15-4703-9ee5-6871f6af08fa

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Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials