Titanium nitride for MEMS hotplates

J.F. Creemer (TU Delft - Electronic Instrumentation)

Lina Sarro (TU Delft - Electronic Components, Technology and Materials)

M Laros (TU Delft - Electronic Components, Technology and Materials)

H Schellevis (TU Delft - Electronic Components, Technology and Materials)

T Nathoeni (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

LA Steenweg (TU Delft - Electronic Components, Technology and Materials)

VL Svechnikov (QN/High Resolution Electron Microscopy)

HW Zandbergen (QN/High Resolution Electron Microscopy)