Non-linear bulk micromachined accelerometer for high sensitivity applications
L.M. Middelburg (TU Delft - Electronic Components, Technology and Materials)
B. El Mansouri (TU Delft - Electronic Components, Technology and Materials)
Rene Poelma (TU Delft - Electronic Components, Technology and Materials)
G.Q. Zhang (TU Delft - Electronic Components, Technology and Materials)
Henk van Zeijl (TU Delft - Electronic Components, Technology and Materials)
Jia Wei (TU Delft - EKL Processing, TU Delft - Else Kooi Laboratory)
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Abstract
This work describes the design, modelling and realisation of the mechanical part of a non-linear MEMS accelerometer intended for large displacement behaviour. For this, a mass/spring system was designed with an extremely low resonance frequency. In this work the mechanical behaviour was verified by measurements done using an optical setup, including a laser and photodiode. The results are a resonance frequency of 12.6 Hz, which can be further tuned depending on the application by varying the mass, beam thickness and tilt of the structure. This results in a mechanical sensitivity of 0.16 [mm/ms-2]. The future goal of this work is to integrate a read-out scheme on wafer level, for example electrostatically.