Bulk-Si FinFET Technology for Ultra-High Aspect-Ratio Devices
Conference Paper
(2009)
Author(s)
V. Jovanovic (TU Delft - Electronic Components, Technology and Materials)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
T Suligoj (External organisation)
M Poljak (External organisation)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:d3f7a7a5-4659-4415-99c9-7791ffa31ac1
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
241-244
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