Analysis and calibration of process variations for an array of temperature sensors
S. Xie (TU Delft - Electronic Instrumentation)
A. Abarca Prouza (TU Delft - Electronic Instrumentation)
J. Markenhof (External organisation)
Xiaoliang Ge (TU Delft - Electronic Instrumentation)
Albert J.P. Theuwissen (TU Delft - Electronic Instrumentation)
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Abstract
This paper presents an analysis and calibration of process variations for an array of temperature sensors, which are incorporated into a CMOS image sensor chip. Making use of the experimental results of more than 500 temperature sensors implemented on the same chip, the proposed calibration method has removed their process variations from 14.3 % to 2.5 % (3 sigma).
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