Fast deposition of microcrystalline silicon with an expanding thermal plasma
Conference Paper
(2001)
Author(s)
C Smit (TU Delft - Electronic Components, Technology and Materials)
EAG Hamers (External organisation)
BA Korevaar (External organisation)
Rene Van van Swaaij (TU Delft - Electronic Components, Technology and Materials)
MCM van de Sanden (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:decbc76f-4d32-47c1-a19f-c1ea8f5e5d2b
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
182-185
ISBN (print)
90-73461-29-4
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