Thermal stepper: a high stability postioning system for micro adjustment
Conference Paper
(2009)
Author(s)
J.P. van Schieveen (TU Delft - Mechatronic Systems Design)
Jo W. Spronck (TU Delft - Mechatronic Systems Design)
S. Nihtianova (TU Delft - Electronic Instrumentation)
R.H. Munnig Schmidt (TU Delft - Mechatronic Systems Design)
Research Group
Mechatronic Systems Design
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https://resolver.tudelft.nl/uuid:df4b2c21-c185-4297-96b1-3a8f02f1032f
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Publication Year
2009
Research Group
Mechatronic Systems Design
Pages (from-to)
110-114
ISBN (print)
978-0-9553082-6-0
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