New insights in microcrystalline silicon deposition with expanding thermal plasma chemical vapour deposition

Journal article (2006)

Authors

R.A.C.M.M. van Swaaij Electronic Components, Technology and Materials - EEMCS
R Jimenez Zambrano Electronic Components, Technology and Materials - EEMCS
C Smit Electronic Components, Technology and Materials - EEMCS
MCM van de Sanden External organisation
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Elektrotechniek Techniek
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Published Date

2006

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials