New insights in microcrystalline silicon deposition with expanding thermal plasma chemical vapour deposition
Journal Article
(2006)
Author(s)
Rene Van van Swaaij (TU Delft - Electronic Components, Technology and Materials)
R Jimenez Zambrano (TU Delft - Electronic Components, Technology and Materials)
C Smit (TU Delft - Electronic Components, Technology and Materials)
MCM van de Sanden (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:e0cf236d-9620-4c2d-b909-3c93cd1cf4c6
More Info
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Issue number
9-20
Volume number
352
Pages (from-to)
933-936
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