Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

Conference paper (2011)

Authors

A. Sakic Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

T Knezevic External organisation

I Spee External organisation

G van Veen External organisation

K Kooijman External organisation

P. Vogelsang External organisation

T.L.M. Scholtes Electronic Components, Technology and Materials -

W de Boer External organisation

W.H.A. Wien Electronic Components, Technology and Materials -

S. Milosavljevic Electronic Components, Technology and Materials -

C.Th.H. Heerkens External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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More Info

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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials