Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

Sakic, A.; Nanver, L.K.; Knezevic, T; Spee, I; van Veen, G; Kooijman, K; Vogelsang, P.; Scholtes, T.L.M.; de Boer, W; Wien, W.H.A.; Milosavljevic, S.; Heerkens, C.Th.H.

Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

Conference paper (2011)

Authors

A. Sakic Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

T Knezevic External organisation

I Spee External organisation

G van Veen External organisation

K Kooijman External organisation

P. Vogelsang External organisation

T.L.M. Scholtes Electronic Components, Technology and Materials -

W de Boer External organisation

W.H.A. Wien Electronic Components, Technology and Materials -

S. Milosavljevic Electronic Components, Technology and Materials -

C.Th.H. Heerkens External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:e32adbba-6e83-461c-8f0f-16ba475c5505

More Info

expand_more

Published Date

2011

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials