A miniaturized low power Pirani pressure sensor based on suspended graphene
Joost Romijn (TU Delft - Electronic Components, Technology and Materials)
Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)
Robin J. Dolleman (Kavli institute of nanoscience Delft, TU Delft - QN/Steeneken Lab)
Manvika Singh (TU Delft - Electronic Components, Technology and Materials)
Herre S.J. van der Zant (TU Delft - QN/van der Zant Lab, Kavli institute of nanoscience Delft)
Peter Steeneken (Kavli institute of nanoscience Delft, TU Delft - Dynamics of Micro and Nano Systems, TU Delft - QN/Steeneken Lab)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
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Abstract
Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure sensor area, while enabling wafer-scale fabrication. The response of the miniaturized pressure sensor is similar to that of the much larger state-of-the-art Si-based Pirani pressure sensors, demonstrating the potential of graphene-based Pirani sensors.