A miniaturized low power Pirani pressure sensor based on suspended graphene

Conference paper (2018)

Authors

J. Romijn Electronic Components, Technology and Materials - EEMCS
S. Vollebregt Electronic Components, Technology and Materials - EEMCS
R.J. Dolleman Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS
M. Singh Electronic Components, Technology and Materials - EEMCS
H.S.J. van der Zant Kavli institute of nanoscience Delft, QN/van der Zant Lab - AS
P.G. Steeneken Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering , QN/Steeneken Lab - AS , Kavli institute of nanoscience Delft
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Copyright: © 2018 J. Romijn, S. Vollebregt, R.J. Dolleman, M. Singh, H.S.J. van der Zant, P.G. Steeneken, Pasqualina M Sarro
DOI
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https://doi.org/10.1109/NEMS.2018.8556902
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Published Date

2018

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure sensor area, while enabling wafer-scale fabrication. The response of the miniaturized pressure sensor is similar to that of the much larger state-of-the-art Si-based Pirani pressure sensors, demonstrating the potential of graphene-based Pirani sensors.