A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation
Conference Paper
(2008)
Author(s)
J. Derakhshandeh (TU Delft - Electronic Components, Technology and Materials)
MR Tajari Mofrad (TU Delft - Electronic Components, Technology and Materials)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
J van der Cingel (TU Delft - Old - EWI Sect. ECTM)
C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:e8768aaf-4f12-4402-834a-4f6dd53c49b7
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
327-330
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