Output blue light evaluation for phosphor based smart white LED wafer level packages
Z Koladouz Esfahani (TU Delft - Electronic Components, Technology and Materials)
Ali Rostamian (University of Tehran)
Mohammadreza Kolahdouz (University of Tehran)
Henk van Zeijl (TU Delft - EKL Processing)
Guo Qi Zhang (TU Delft - Electronic Components, Technology and Materials)
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Abstract
This study presents a blue light detector for evaluating the output light of phosphor based white LED package. It is composed of a silicon stripe-shaped photodiode designed and implemented in a 2 μm BiCMOS process which can be used for wafer level integration of different passive and active devices all in just 5 lithography steps. The final device shows a high selectivity to blue light. The maximum responsivity at 480nm is matched with the target blue LED illumination. The designed structure have better responsivity compared to simple photodiode structure due to reducing the effect of dead layer formation close to the surface because of implantation. It has also a two-fold increase in the responsivity and quantum efficiency compared to previously similar published sensors.