Integrating carbon nanotubes as vias in a monolithic 3DIC process

Vollebregt, S; Ishihara, R; Chiaramonti, AN; van der Cingel, J.; Beenakker, C. W J

Integrating carbon nanotubes as vias in a monolithic 3DIC process

Conference paper (2012)

Authors

S Vollebregt Electronic Components, Technology and Materials

R Ishihara Electronic Components, Technology and Materials

AN Chiaramonti External organisation

J. van der Cingel Electronic Components, Technology and Materials

C. W J Beenakker Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2012

Language

English

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Research Group

Electronic Components, Technology and Materials

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