Integrating carbon nanotubes as vias in a monolithic 3DIC process

Conference Paper (2012)
Author(s)

Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)

R Ishihara (TU Delft - Electronic Components, Technology and Materials)

AN Chiaramonti (External organisation)

J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)

C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1170-1171

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