Integrating carbon nanotubes as vias in a monolithic 3DIC process
Conference Paper
(2012)
Author(s)
Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
AN Chiaramonti (External organisation)
J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)
C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:f26a3b95-564a-401a-a06c-ca5c80bc8635
More Info
expand_more
expand_more
Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1170-1171
No files available
Metadata only record. There are no files for this record.