Ripple reduction in piezoelectric micropumps by phased actuation in parallel and damping

Conference paper (2022)

Authors

G. Özkayar Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
J.C. Lötters Precision and Microsystems Engineering , Bronkhorst High-Tech BV
M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
M.K. Ghatkesar Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2022 G. Özkayar, J.C. Lötters, M. Tichem, M.K. Ghatkesar
Damping Ripples Piezoelectric micropumps Low flow rate
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Published Date

2022

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering

Abstract

Piezoelectric micropumps enable miniaturization in microfluidics for lab-on-a-chip applications such as Organs-on-chips (OoC). However, achieving a steady flow with these micropumps is a significant challenge because of the reciprocating motion of the displacing component. Although dampers are widely preferred for reducing ripples, they are not efficient at low flow rates. Here, we propose a phased-actuation of piezoelectric micropumps connected in parallel and a damper to minimize ripples at low flow rates. We are able to reduce ripples by 80% with our proposed configuration compared to a micropump-only configuration between 10-50 μl/min flow rate range.

Files

PG0955.pdf
(.pdf | 1.71 Mb)