Ripple reduction in piezoelectric micropumps by phased actuation in parallel and damping
G. Özkayar (TU Delft - Micro and Nano Engineering)
J.C. Lötters (Bronkhorst High-Tech BV, TU Delft - Precision and Microsystems Engineering)
M. Tichem (TU Delft - Micro and Nano Engineering)
M.K. Ghatkesar (TU Delft - Micro and Nano Engineering)
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Abstract
Piezoelectric micropumps enable miniaturization in microfluidics for lab-on-a-chip applications such as Organs-on-chips (OoC). However, achieving a steady flow with these micropumps is a significant challenge because of the reciprocating motion of the displacing component. Although dampers are widely preferred for reducing ripples, they are not efficient at low flow rates. Here, we propose a phased-actuation of piezoelectric micropumps connected in parallel and a damper to minimize ripples at low flow rates. We are able to reduce ripples by 80% with our proposed configuration compared to a micropump-only configuration between 10-50 μl/min flow rate range.