Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology
Conference Paper
(2008)
Author(s)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
F Sarubbi (TU Delft - Electronic Components, Technology and Materials)
V Gonda (TU Delft - Old - EWI Sect. ECTM)
M Popadic (TU Delft - Electronic Components, Technology and Materials)
TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)
Wiebe de Boer (TU Delft - Electronic Components, Technology and Materials)
K. Buisman (TU Delft - Electronics)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:f9afaf6c-b624-4d8f-9237-4dd9ff155992
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
101-106
ISBN (print)
978-1-4244-1737-7
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