Extremely ultrashallow junctions for a high-linearity silicon-on-glass RF varactor-diode technology

Conference Paper (2008)
Author(s)

Lis Nanver (TU Delft - Electronic Components, Technology and Materials)

F Sarubbi (TU Delft - Electronic Components, Technology and Materials)

V Gonda (TU Delft - Old - EWI Sect. ECTM)

M Popadic (TU Delft - Electronic Components, Technology and Materials)

TLM Scholtes (TU Delft - Electronic Components, Technology and Materials)

Wiebe de Boer (TU Delft - Electronic Components, Technology and Materials)

K. Buisman (TU Delft - Electronics)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
101-106
ISBN (print)
978-1-4244-1737-7

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