A 9.1 mW inductive displacement-to-digital converter with 1.85 nm resolution

Conference paper (2017)

Authors

Chaturvedi Electronic Instrumentation - EEMCS
Vogel Electronic Instrumentation - EEMCS
Makinwa Microelectronics
Nihtianov Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Sensor ADC Delta Oscillator Precision Displacement Chopping Eddy-current Inductance Sigma
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Published Date

2017

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

A displacement-to-digital converter (DDC) based on inductive (eddy-current) sensor is presented. The sensor is embedded in a self-oscillating front-end, whose 145MHz output is then digitized by a ratiometric ΔΣ ADC. Over a 10μm range, the DDC achieves 1.85nm resolution (1.02 pH), in a 2kHz bandwidth. It draws 9.1mW from a 1.8 V supply making it the most energy-efficient ECS interface ever reported.

Files

08008556.pdf
(.pdf | 1.59 Mb)