A 9.1 mW inductive displacement-to-digital converter with 1.85 nm resolution

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A 9.1 mW inductive displacement-to-digital converter with 1.85 nm resolution

Conference Paper (2017)

Author(s)

V. Chaturvedi (TU Delft - Electronic Instrumentation)

Johan G. Vogel (TU Delft - Electronic Instrumentation)

K.A.A. Makinwa (TU Delft - Microelectronics)

S. Nihtianova (TU Delft - Electronic Instrumentation)

Research Group

Electronic Instrumentation

DOI related publication

https://doi.org/10.23919/vlsic.2017.8008556

Sensor ADC Delta Oscillator Precision Displacement Chopping Eddy-current Inductance Sigma

To reference this document use:

https://resolver.tudelft.nl/uuid:fcac49ef-a15a-4480-9f03-7f2b258d7aff

More Info

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Publication Year

2017

Language

English

Research Group

Electronic Instrumentation

Bibliographical Note

C7-2@en

Pages (from-to)

C80-C81

ISBN (print)

978-4-86348-606-5

ISBN (electronic)

978-4-86348-614-0

Abstract

A displacement-to-digital converter (DDC) based on inductive (eddy-current) sensor is presented. The sensor is embedded in a self-oscillating front-end, whose 145MHz output is then digitized by a ratiometric ΔΣ ADC. Over a 10μm range, the DDC achieves 1.85nm resolution (1.02 pH), in a 2kHz bandwidth. It draws 9.1mW from a 1.8 V supply making it the most energy-efficient ECS interface ever reported.

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