Patterned growth of carbon nanotubes for vertical interconnects in 3D integrated circuits
Conference Paper
(2010)
Author(s)
Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)
J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)
C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:febe6eb6-54ec-4ae0-a1e1-5e8d7cb211dc
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
184-187
ISBN (print)
978-90-73461-67-3
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