Patterned growth of carbon nanotubes for vertical interconnects in 3D integrated circuits

Conference Paper (2010)
Author(s)

Sten Vollebregt (TU Delft - Electronic Components, Technology and Materials)

R Ishihara (TU Delft - Electronic Components, Technology and Materials)

W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)

J. van der Cingel (TU Delft - Electronic Components, Technology and Materials)

C.I.M. Beenakker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
184-187
ISBN (print)
978-90-73461-67-3

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