Print Email Facebook Twitter Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures Title Investigating Mechanical Properties of Silicon Carbide Coated Carbon Nanotube Composite at Elevated Temperatures Author Mo, J. (TU Delft Electronic Components, Technology and Materials) Schaffar, Gerald J.K. (Montanuniversität Leoben) Du, L. (TU Delft Electronic Components, Technology and Materials) Maier-Kiener, Verena (Montanuniversität Leoben) Kiener, Daniel (Montanuniversität Leoben) Vollebregt, S. (TU Delft Electronic Components, Technology and Materials) Zhang, Kouchi (TU Delft Electronic Components, Technology and Materials) Date 2024 Abstract Silicon carbide (SiC) coated vertically aligned carbon nanotubes (VACNT) are attractive material for fabricating MEMS devices as an alternative for bulk micromachining of SiC. In order to examine the mechanical properties of SiC-CNT composites at high temperatures, we fabricated VACNT micro-pillars with different amounts of SiC coating and performed high-temperature micro-pillar compression on these samples. The indentation result shows that the coating can improve the elastic modulus up to three orders of magnitude. Samples were tested at room temperature, 300°C, 600°C, and 900°C under compressive load. No significant degradation of the mechanical properties was observed at elevated temperatures, demonstrating the harsh environment potential of this composite. Subject SiC-CNT compositehigh-temperaturemicro-pillarcompression test To reference this document use: http://resolver.tudelft.nl/uuid:57847760-f408-4c02-a96b-a5aa43b81648 DOI https://doi.org/10.1109/MEMS58180.2024.10439455 Publisher IEEE, Danvers Embargo date 2024-08-22 ISBN 979-8-3503-5792-9 Source Proceedings of the 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Event 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS), 2024-01-21 → 2024-01-25, Austin, United States Bibliographical note Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. Part of collection Institutional Repository Document type conference paper Rights © 2024 J. Mo, Gerald J.K. Schaffar, L. Du, Verena Maier-Kiener, Daniel Kiener, S. Vollebregt, Kouchi Zhang Files file embargo until 2024-08-22