Print Email Facebook Twitter Optimized MEMS-based Nanoreactor for In-Situ Transmission Electron Microscopy Studies at High Temperature and Atmospheric Pressure Title Optimized MEMS-based Nanoreactor for In-Situ Transmission Electron Microscopy Studies at High Temperature and Atmospheric Pressure Author Spruit, Ronald (TU Delft Mechanical, Maritime and Materials Engineering; TU Delft Precision and Microsystems Engineering) Contributor Ghatkesar, M.K. (mentor) Perez Garza, H.H. (mentor) Tichem, M. (graduation committee) Steeneken, P.G. (graduation committee) French, P.J. (graduation committee) Degree granting institution Delft University of Technology Programme Mechanical Engineering | Micro and Nano Engineering Date 2017-09-29 Abstract Transmission electron microscopy is a powerful and commonly used tool to study nanoparticles, nanowires and 2D materials. It provides static information from the sample with atomic resolution, in high vacuum and at ambient temperature. However, in real processes, the environment is often different and dynamic. MEMS-based sample carriers became a breakthrough for in-situ TEM where they function as a micro-sized laboratory and enable dynamic studies. The Nanoreactor allows for manipulation of samples by simultaneously applying heat and gas stimuli, through which real-time studies of solid-gas interactions are enabled inside the TEM. Many challenges are still to be faced in further optimization of Nanoreactors. Especially because the tiny scale and the extreme conditions at which these devices must operate, limit the number of suitable tools to characterize and help understand their behavior. In this project, the electro-thermo-mechanical behavior of the Nanoreactor is characterized using various microscale analytical techniques. The obtained results are used to model the Nanoreactor with finite element analysis, including electric current, mechanical stability, heat transfer, gas flow, and their interdependence. Using the acquired knowledge and the model, an optimized Nanoreactor design is proposed that improves membrane deflection, spatial sample drift, temperature homogeneity, temperature stability, gas flow speed and gas switching time. Subject NanoreactorMicroheaterMEMSSample carrierIn-situ transmission electron microscopyJoule heatingHeat transferGas flowSolid-gas interactions To reference this document use: http://resolver.tudelft.nl/uuid:7749f4ff-6a05-41b2-b82c-7b763788f36c Embargo date 2019-09-29 Part of collection Student theses Document type master thesis Rights © 2017 Ronald Spruit Files PDF MNE_2017_045_Spruit_MSc_Thesis.pdf 45.13 MB Close viewer /islandora/object/uuid:7749f4ff-6a05-41b2-b82c-7b763788f36c/datastream/OBJ/view